Large Scale MPCVD Diamond Technology

With vision that diamond will be a 21st century engineering material, 6C Technology Limited was established in the Hong Kong Science Park in 2012 to specialize in developing technology to produce large size scale diamond of best quality in an economical way to prepare for the era of range of applications that will base on diamond material. We have developed both 2.45GHz and 915MHz type Microwave Plasma Chemical Vapor Deposition (MPCVD) systems with power ranging from 6kW to over 25kw, successfully produced diamond wafer up to 6” . We have produced Boron-doped diamond (BDD) with semiconductor properties as verified by Hong Kong University laboratory. We have developed hydrogen generator which can produce hydrogen with purity up to 9N which is an import gas source for CVD.

以金剛石將成為21世紀的工程材料作為願景,六晶科技有限公司於2012年在香港科學園成立,致力於開發以經濟方式生產高質量的大尺寸金剛石的技術,以迎接以金剛石材料為基礎的各種應用時代的到來。我們已經開發了2.45GHz和915MHz類型的微波等離子體化學氣相沉積(MPCVD)系統,功率從6kW到超過25kw,成功地生產出6英寸的金剛石晶圓。我們已經生產出具有半導體特性的摻硼金剛石(BDD),並得到了香港大學實驗室的驗證。我們開發了氫氣發生器,可以生產純度高達9N的氫氣,這是一種用於CVD的主要原料氣體。